JPH0413661U - - Google Patents
Info
- Publication number
- JPH0413661U JPH0413661U JP5344790U JP5344790U JPH0413661U JP H0413661 U JPH0413661 U JP H0413661U JP 5344790 U JP5344790 U JP 5344790U JP 5344790 U JP5344790 U JP 5344790U JP H0413661 U JPH0413661 U JP H0413661U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- electrode
- gas inlet
- electrode box
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000009713 electroplating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5344790U JPH0413661U (en]) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5344790U JPH0413661U (en]) | 1990-05-22 | 1990-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0413661U true JPH0413661U (en]) | 1992-02-04 |
Family
ID=31574639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5344790U Pending JPH0413661U (en]) | 1990-05-22 | 1990-05-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0413661U (en]) |
-
1990
- 1990-05-22 JP JP5344790U patent/JPH0413661U/ja active Pending
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